发明名称 SEMICONDUCTOR ELEMENT, THIN FILM TRANSISTOR SUBSTRATE, AND DISPLAY DEVICE
摘要 <p>Disclosed is a semiconductor element (ST) which comprises a substrate (11), a gate electrode (12b), a gate insulating film (13b), an oxide semiconductor film (14b) that is provided with a channel portion (14bc) at a position facing the gate electrode (12b), a source electrode (15bs), and a drain electrode (15bd). The source electrode (15bs) and the drain electrode (15bd) are arranged so as not to overlap with the gate electrode (12b) when viewed in plan. Non-overlapping portions of the region that is adjacent to both the gate electrode (12b) and the source electrode (15bs) and the region that is adjacent to both the gate electrode (12b) and the drain electrode (15bd) have been subjected to a resistance reducing treatment, said portions including the surface of the oxide semiconductor film (14b).</p>
申请公布号 WO2011151955(A1) 申请公布日期 2011.12.08
申请号 WO2011JP01225 申请日期 2011.03.02
申请人 SHARP KABUSHIKI KAISHA;KATOH, SUMIO 发明人 KATOH, SUMIO
分类号 H01L21/336;G02F1/1368;G09F9/30;H01L29/786 主分类号 H01L21/336
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