DEVICE AND METHOD FOR MEASURING SHAPE

摘要

In the disclosed device and method, compound lenses (202, 203, 204) are disposed-on the light axis of light that is incident to a measured object (105) and light towards a reference mirror (107)-of which the achromatic conditions, beam diameter conditions, and color difference reduction conditions of each are optimized using the focal distance and/or the Abbe number of a collimator lens; and by means of correcting the wavefront using these compound lenses (202, 203, 204), the effect of wavefront aberration is abated, and the resolution of shape measurement by means of optical interference is increased.