| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photoelectric conversion apparatus having high conversion efficiency and a manufacturing method thereof. <P>SOLUTION: A photoelectric conversion apparatus has: a working electrode having a transparent electrode 2 and an oxide semiconductor layer 3 formed on a surface of the transparent electrode for supporting dyes; a counter electrode 5; and an electrolyte layer 4. A hydroxyl group concentration on a surface of the oxide semiconductor layer is 0.01/(nm)<SP POS="POST">2</SP>or more and 4.0/(nm)<SP POS="POST">2</SP>or less, and an adsorption water concentration on the same surface is 0.03/(nm)<SP POS="POST">2</SP>or more and 4.0/(nm)<SP POS="POST">2</SP>or less. A method of manufacturing the photoelectric conversion apparatus includes: a first step for forming the oxide semiconductor layer 3 on the surface of the transparent electrode 2; a second step for controlling through low-temperature plasma processing under an oxidized atmosphere so that the hydroxyl group concentration on the surface of the oxide semiconductor layer becomes 0.01/(nm)<SP POS="POST">2</SP>or more and 4.0/(nm)<SP POS="POST">2</SP>or less and the adsorption water concentration on the same surface becomes 0.03/nm<SP POS="POST">2</SP>or more and 4.0/(nm)<SP POS="POST">2</SP>or less; and a third step for supporting the dyes on the oxide semiconductor layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
