发明名称 |
Method For Forming Thin Film And Apparatus Therefor |
摘要 |
A plurality of antenna elements, each of which has first and second linear conductors whose first ends are electrically interconnected are formed. The antenna elements are arranged in plane in such a way that the first and second linear conductors are alternated and separated from one another at regular intervals, thereby forming one or more array antennas which are disposed in a chamber. The second ends of the first linear conductors are connected to a high-frequency power supply, and the second ends of the second linear conductors are connected to ground. A plurality of substrates are parallel placed on both sides of the array antennas at distances approximate to the distances between the linear conductors. A film is formed by introducing an ingredient gas into the chamber.
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申请公布号 |
US2011297089(A1) |
申请公布日期 |
2011.12.08 |
申请号 |
US201113211901 |
申请日期 |
2011.08.17 |
申请人 |
UEDA MASASHI;TAKAGI TOMOKO;ITO NORIKAZU;IHI CORPORATION |
发明人 |
UEDA MASASHI;TAKAGI TOMOKO;ITO NORIKAZU |
分类号 |
C23C16/509;H01L31/18;B05C9/08;B05C13/00;C23C16/455;C23C16/458;C23C16/50;H01L31/04 |
主分类号 |
C23C16/509 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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