| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a machining device for grinding or polishing a workpiece with high machining quality and accuracy. <P>SOLUTION: The machining device provided with a plurality of machining means for grinding or polishing the workpiece includes: a chuck table for holding the workpiece, a first machining means disposed opposite to the chuck table for grinding or polishing the workpiece held by the chuck table, a second machining means disposed opposite to the chuck table for grinding or polishing the workpiece held by the chuck table, a first moving means for positioning the first machining means at a location facing the chuck table so as to machine the workpiece held by the chuck table, and a second moving means for positioning the second machining means at a location facing the chuck table so as to machine the workpiece held by the chuck table. <P>COPYRIGHT: (C)2012,JPO&INPIT |
