| 发明名称 |
TRENCH CAPACITOR AND METHOD OF FABRICATION |
| 摘要 |
An improved trench capacitor and method of fabrication are disclosed. The trench capacitor utilizes a rare-earth oxide layer to reduce depletion effects, thereby improving performance of the trench capacitor. |
| 申请公布号 |
US2011298089(A1) |
申请公布日期 |
2011.12.08 |
| 申请号 |
US20100793051 |
申请日期 |
2010.06.03 |
| 申请人 |
KRISHNAN RISHIKESH;CHUDZIK MICHAEL P.;KRISHNAN SIDDARTH A.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KRISHNAN RISHIKESH;CHUDZIK MICHAEL P.;KRISHNAN SIDDARTH A. |
| 分类号 |
H01L29/92;H01L21/02 |
主分类号 |
H01L29/92 |
| 代理机构 |
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| 主权项 |
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