ANALYSIS DEVICE AND MANUFACTURING METHOD FOR SAME

摘要

In order to analyse a target quickly and at low cost: a recess section (2) is formed on a semi conductor substrate (1) by means of deep etching; a sensor section (5), which is an electric field-effect device formed in the recess section (2), has electrical properties which change according to the reactions of a target reagent which has been set in a gate region; pump units (6A, 6B) are formed inside the recess section (2) in order to implement the supply and/or discharge of a fluid which contains the reagent to the sensor section (5); and a cover section (3) is bonded to the semiconductor substrate (1) so as to cover the recess section (2), and is provided with an injection opening and a discharge opening for the fluid relative to the recess section (2).