FABRICATION METHOD OF ETCHING MASK, ETCHING MASK THEREBY, AND ETCHING METHOD THEREBY

摘要

PURPOSE: A method for manufacturing an etching mask, an etching mask thereof, and an etching method using the same are provided to improve the quality of etching by increasing the adhesion of the etching mask of an etching object. CONSTITUTION: An upper mold(12) and a bottom mold(14) are prepared. The surface of the upper mold and the bottom mold are plasma-processed. A polymer resin solution(30) is filled in a space(16) which is formed between the upper mold and the low mold. The polymer resin solution is hardened. A hardened polymer resin solution becomes released from the upper mold and the bottom mold.