METHOD FOR MANUFACTURING A COATED MEMBER

摘要

The disclosed method for manufacturing a coated member is provided with a DLC-film formation step in which a feedstock gas containing a carbon compound and an oxygen-containing organic silicon compound is introduced into a treatment chamber containing a base material, and at a treatment pressure between 100 and 400 Pa, a voltage is applied to the base material, thereby generating a plasma and forming a DLC film on the surface of the base material. The oxygen-containing organic silicon compound may be, for example, hexamethyldisiloxane. In the DLC-film formation step, the voltage applied to the base material is, for example, a DC pulse voltage.