| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a frequency-shifting interferometer capable of stably measuring an optical profile of a specimen at high speed, and to provide a method thereof. <P>SOLUTION: A frequency-shifting interferometer 10 measures an optical profile of a specimen 12 with a continuous turning type light source 16. A series of interference images of the specimen 12 are captured, and a beam frequency when the interference images are formed is acquired. A limited number of the interference images whose monitoring beam frequency substantially matches a predetermined beam frequency interval pattern are selected from the captured interference images of the specimen. The processing is further continued on the basis of the selected interference images. <P>COPYRIGHT: (C)2012,JPO&INPIT |
