摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small impedance matching element of which variation in quality is small, having a harmonic suppression function and large current resistance. <P>SOLUTION: The impedance matching element includes a wiring part of a wiring conductor pattern embedded inside a first dielectric material D1 or formed on the surface, inductor parts L4 and L5 of an inductor conductor pattern embedded inside the first dielectric material D1 or formed on the surface, a capacitor part C1 in which a second dielectric material D2 is interposed, with a dielectric constant higher than the first dielectric material D1, between at least a pair of capacitor conductor patterns CC1, and harmonic suppression parts S2, S3, and S4 of a harmonic suppressing conductor pattern having a line length adjusted to suppress the harmonic signal which is to be suppressed. Here, the thickness of the wiring conductor pattern and inductor conductor pattern are 20 μm or more. <P>COPYRIGHT: (C)2012,JPO&INPIT |