METHOD OF MANUFACTURING LIQUID DROPLET EJECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid droplet ejecting device which increases the ejection amount of liquid droplets.

SOLUTION: A liquid droplet ejecting device includes a structure in which a plurality of vibrators are regularly arranged on the upper surface of a substrate. The substrate has a structure in which a cavity which serves as the cavity and an ejection hole and a supply hole which are flow paths for a liquid are formed in a plate having roughly flat upper and lower surfaces. The width of the cavity narrows from the upper surface toward the lower surface of the substrate. The depth of the cavity becomes deeper from a supply hole side toward an ejection hole side. The depth of the cavity may become shallower from the supply hole side toward the ejection hole side in a portion which occupies a relatively small range at the supply hole side. The depth of the cavity may become deeper from the supply hole side toward the ejection hole side in a portion which occupies a relatively large range at the ejection hole side. The substrate is manufactured by press-fitting a mold having a three-dimensional shape according to the three-dimensional shape of the cavity to the upper surface of a green sheet.

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