DEVICE FOR MONITORING A GASEOUS MEDIUM

摘要

The utility model relates to gas analysis instrumentation and microelectronics and can be used in the development of gas analyzers for detecting and measuring the concentration of gases in the air. The proposed utility model is intended to solve the technical problem of reducing measurement time and increasing the reliability and efficiency of measurements carried out by the device for the purpose of identifying the components of a gas mixture during the composition analysis of multi-component gas mixtures on the basis of the activation energy of molecules interacting with the surface of a solid body by making it possible to carry out simultaneous measurements. The technical problem is solved in that in the device according to the utility model for monitoring a gaseous medium, which device comprises: a power supply; an inlet system for the gaseous medium under analysis; a microcontroller that controls the temperature setting during the measuring process; a vacuum measuring chamber containing a Peltier element with a temperature sensor and a gas sensor disposed on the working surface thereof, said gas sensor comprising a gas-sensitive layer with contacts, which is in the form of a structure modified by argon ion implantation and situated on the surface of a high-resistivity semiconductor substrate; and a charge-sensitive amplifier that is connected to the gas sensor, the Peltier element has at least two stages with a gas sensor and a temperature sensor disposed on the working surface of each stage, the charge-sensitive amplifier has multiple channels, and the number of charge-sensitive amplifier channels corresponds to the number of gas sensors. Furthermore, the device is equipped with a control and data processing unit having an analog-to-digital converter and discrete input-output channels, and with an actuator relay unit for switching the operating modes of the device. The proposed device provides for the simultaneous adsorption/desorption of the atoms and molecules of the gases under analysis by gas-sensitive layers at different temperatures, which makes it possible to compare the spectra of the electrical fluctuation signals produced in the process using an improved methodology for identifying the gases under analysis.