| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress propagation of noise caused by rolling of a ball to the outside, and to firmly fix a turn table and a rolling part to a rotor holder. <P>SOLUTION: In a chucking device 904, the rolling part 943 is disposed on the lower side of an upper lid part of the rotor holder 932 and on the inner side in the radial direction of a cylinder. For this reason, the propagation of the noise caused by rolling of the ball 939 to the outside is suppressed. Moreover, the turn table 941 and the rolling part form a portion of a single resin member continuous via a through-hole 932d provided in the rotor holder, respectively. Thus, the turn table and the rolling part are firmly fixed to the rotor holder. <P>COPYRIGHT: (C)2012,JPO&INPIT |
