| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor characteristic measuring instrument with a contact resistance measuring function, which is capable of improving the reliability of inspection by allowing measurement of contact resistance between an electrical characteristic measuring electrode of a sample and a measurement object, though having a simple configuration and being easy to operate. <P>SOLUTION: The contact resistance measuring function includes a non-DC voltage supplier for supplying a non-DC to a contact point between a measuring electrode and a measurement object X and a non-DC voltage measuring instrument for measuring a voltage at the contact point between the measuring electrode and the measurement object. A non-DC circuit is constituted of a reactance type electric coupler, and a DC circuit cuts off a non-DC by an inductor, so that semiconductor characteristic measurement and measurement of contact resistance between a probe and a sample can be simultaneously performed without mutual influence by a contact resistance measuring circuit with a non-DC and a semiconductor characteristic measuring circuit with a DC. <P>COPYRIGHT: (C)2012,JPO&INPIT |
