METHOD OF MANUFACTURING MICROSTRUCTURE

摘要

PROBLEM TO BE SOLVED: To obtain piezoresistance characteristics in a microstructure made of diamond like carbon manufactured with focused ion beams.

SOLUTION: A substrate is irradiated with the focused ion beams with raw material gas supplied onto it to form the microstructure made of diamond like carbon on a part irradiated with the focused ion beams (step S101). Then, the formed microstructure is heated to remove ions of the focused ion beams from the microstructure to make the microstructure exhibit the piezoresistance characteristics (step S102).

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