| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that since it is difficult to easily and precisely set an area with periodicity, erroneous detection may occur due to position deviation with respect to an area during an inspection. <P>SOLUTION: An electronic line image is continuously obtained like a stripe, and area information is set or corrected according to the change of the brightness of the image so that it is possible to set area information including charging or the like with accuracy. Thus, it is possible to easily and quickly and accurately set the area, and to reduce erroneous detection due to position deviation between the area information and the image, and to improve the reliability and stability of the result of inspection. Therefore, it is possible to achieve highly sensitive inspection. <P>COPYRIGHT: (C)2012,JPO&INPIT |
