发明名称 PATTERN INSPECTING APPARATUS AND PATTERN INSPECTING METHOD
摘要 In conventional methods, efficient analyses with respect to detected defects were not given consideration. A detected image is matched against pre-obtained partial images of a normal part and a defect part to determine a defect in the detected image. Then, the partial images and the detected image are synthesized to generate a review image in which the identifiability of the detected image is improved. Thus, the operator is able to readily make a determination with respect to the detected defect.
申请公布号 US2011298915(A1) 申请公布日期 2011.12.08
申请号 US201013201810 申请日期 2010.02.01
申请人 HIROI TAKASHI;YOSHIDA TAKEYUKI;NOJIRI MASAAKI 发明人 HIROI TAKASHI;YOSHIDA TAKEYUKI;NOJIRI MASAAKI
分类号 H04N7/18;G06K9/00 主分类号 H04N7/18
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