摘要 |
In conventional methods, efficient analyses with respect to detected defects were not given consideration. A detected image is matched against pre-obtained partial images of a normal part and a defect part to determine a defect in the detected image. Then, the partial images and the detected image are synthesized to generate a review image in which the identifiability of the detected image is improved. Thus, the operator is able to readily make a determination with respect to the detected defect. |