| 摘要 |
PURPOSE: A duplex mode differential pressure damper apparatus and a chamber including the same are provided to prevent dew condensation by locally supplying heat to an area where is contacted with the air while a chamber is cooled down. CONSTITUTION: A chamber wall(20) offers the inner space of a chamber. The chamber wall includes a chamber opening(22) which is connected with the outside. A damper contacted protrusion part(21) is formed around the chamber opening. The main frame(11) of the damper keeps a gap from the inner surface of the wall. The main frame of the damper is composed of a differential pressure damper part(12) and an adiabatic part(13).
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