| 摘要 |
PURPOSE: A substrate processing system which includes a linear substrate transfer apparatus is provided to load/unload multiple sheets of substrates to a process chamber at the same time, thereby improving productivity by reducing substrate return time. CONSTITUTION: A process chamber(300a,300b) comprises a substrate support stand in which a substrate is loaded. A transfer chamber(400) is arranged in an edge area of the process chamber. A load-lock chamber(200) respectively loads an unprocessed substrate and a processed substrate. A substrate transfer apparatus(500) loads/unloads the substrate within the process chamber while being included in the inside of the transfer chamber. The substrate transfer apparatus includes a vertical transfer rail, a support bar, and an end effecter. |
