WET DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND METHOD FOR USE THEREOF,申请号EP20070760816-传众专利搜索

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发明名称	WET DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITION AND METHOD FOR USE THEREOF
摘要
申请公布号	EP2013659(A4)	申请公布日期	2011.12.07
申请号	EP20070760816	申请日期	2007.04.18
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	CHEN, KUANG-JUNG;KHOJASTEH, MAHMOUD;KWONG, RANEE, WAI-LING;LAWSON, MARGARET, C.;LI, WENJIE;PATEL, KAUSHAL, S.;VARANASI, PUSHKARA, R.
分类号	G03F7/09;C08F220/28	主分类号	G03F7/09
代理机构		代理人
主权项
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