MULTI STAGE ACTUATION MEMS SWITCH

摘要

PURPOSE: A multi stage actuation MEMS switch is provided to help a user to operate an MEMS switch in a low driving voltage by driving the MEMS switch by two stages or more than. CONSTITUTION: In a multi stage actuation MEMS switch, a first stage driving unit is formed in one side of a substrate(211). A second stage driving unit is formed in the top of a substrate. A first electrode(218) is formed in one side of the substrate and is combined with the first stage driving unit. A second electrode(222) is formed in one side of the substrate and is combined with the second stage driving unit. First and second driving electrodes(213, 214) generates constant power when receiving the driving voltage. The first and second driving electrodes are combined with one side of the substrate together with an insulator.