摘要 |
A probe array base (140) including probe-holding portions (142) which are periodically arranged on a solid base member (140) and which have partitions (143;144;146) and pores is prepared by anisotropically etching a single-crystalline silicon substrate. Probe solutions are supplied to the probe-holding portions from a plurality of tank arrays having a certain cylinder period by capillary action. This allows a probe array to be completed. The probe array is used as, for example, a DNA or antigen chip, has a high degree of integration, and is capable of holding a constant and sufficient number of probe molecules. |