发明名称 Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition
摘要 It is a main object of the present invention to provide a polyimide precursor and a polyimide precursor resin composition, which precursor being easy to synthesize, available at low cost, excellent in storage and capable of giving polyimide that is low in impurities after imidization, irrespective of the chemical structure of the finally-obtained polyimide. It is another object of the present invention to provide a polyimide precursor having repeating units represented by the following formula (1) and a photosensitive resin composition comprising the polyimide precursor and a photoacid generator or photobase generator: In the formula (1), R1 is a tetravalent organic group; R2 is a divalent organic group; R1s may be the same or different from each other and R2s may be the same or different from each other in the repeating units; R3 and R4 respectively represent a monovalent organic group having a structure represented by the following formula (2) and may be the same or different from each other; and R3s and R4s in the repeating units may be the same or different from each other, respectively. In the formula (2), R5, R6 and R7 respectively represent a hydrogen atom, a halogen atom or a monovalent organic group; R8 is a monovalent organic group; R8s in the repeating units may be the same or different from each other; 35 mole % or less of R8s are organic groups having a reactive group; and R5, R6, R7 and R8 may be bonded to each other to form a ring structure.
申请公布号 US8071273(B2) 申请公布日期 2011.12.06
申请号 US20090412565 申请日期 2009.03.27
申请人 SAKAYORI KATSUYA;DAI NIPPON PRINTING CO., LTD. 发明人 SAKAYORI KATSUYA
分类号 G03F7/28;G03F7/038;G03F7/039 主分类号 G03F7/28
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