Computer generated hologram, exposure apparatus, and device fabrication method

摘要

The present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, comprising an anisotropic layer whose refractive index with respect to linearly polarized light in a first direction is different from a refractive index of the anisotropic layer with respect to linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, and an isotropic layer whose refractive index with respect to the linearly polarized light in the first direction is equal to a refractive index of the isotropic layer with respect to the linearly polarized light in the second direction.