发明名称 Unbalanced ion source
摘要 A dual unbalanced indirectly heated cathode (IHC) ion chamber is disclosed. The cathodes have different surface areas, thereby affecting the amount of heat radiated by each. In the preferred embodiment, one cathode is of the size and dimension typically used for IHC ionization, as traditionally used for hot mode operation. The second cathode, preferably located on the opposite wall of the chamber, is of a smaller size. This smaller cathode is still indirectly heated by a filament, but due to its smaller size, radiates less heat into the source chamber, allowing the ion source to operate in cold mode, thereby preserving the molecular structure of the target molecules. In both modes, the unused cathode is preferably biased so as to be at the same potential as the IHC, thus allowing it to act as a repeller.
申请公布号 US8072149(B2) 申请公布日期 2011.12.06
申请号 US20080079978 申请日期 2008.03.31
申请人 CHO JEONG-HA;KOO BON-WOONG;YOON BYUNG-YEAL;KIM YONG-TAE;YOON JEONG-HO;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 CHO JEONG-HA;KOO BON-WOONG;YOON BYUNG-YEAL;KIM YONG-TAE;YOON JEONG-HO
分类号 H01J7/24 主分类号 H01J7/24
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