发明名称 Membrane for a MEMS condenser microphone
摘要 A membrane (2) for a microphone (1) is disclosed which comprises a first portion (A1), a second portion (A2), and elements (E1 . . . E4, E1′. . . E4′), which connect said first (A1) and said second portion (A2). The second portion (A2) is arranged for a movement in relation to said first portion (A1) around an idle position, which movement includes at least a translatory component in a direction of movement (dm) normal to said membrane (2). The elements (E1 . . . E4, E1′. . . E4′) are provided for definition of a spring constant for said movement around said idle position and are arranged substantially along the outer border of said second portion (A2).
申请公布号 US8072010(B2) 申请公布日期 2011.12.06
申请号 US20060914741 申请日期 2006.04.25
申请人 LUTZ JOSEF;KNOWLES ELECTRONICS ASIA PTE, LTD. 发明人 LUTZ JOSEF
分类号 H01L29/84 主分类号 H01L29/84
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