发明名称 |
Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer |
摘要 |
Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer are provided. One method includes determining one or more characteristics of images of the layer of the wafer acquired using the inspection system and different optical modes available on the inspection system. The method also includes identifying a first portion of the different optical modes as not candidates for use in the inspection of the layer of the wafer based on the one or more characteristics of the images. In addition, the method includes generating output by eliminating the first portion of the different optical modes from the different optical modes at which the images were acquired such that the output includes a second portion of the different optical modes indicated as the candidates for use in the inspection. |
申请公布号 |
US8073240(B2) |
申请公布日期 |
2011.12.06 |
申请号 |
US20080115832 |
申请日期 |
2008.05.06 |
申请人 |
FISCHER VERLYN;MAHER CHRIS;HIRIYANNAIAH HARISH;VORA YOUNUS;DING PING;HILL ANDREW;KLA-TENCOR CORP. |
发明人 |
FISCHER VERLYN;MAHER CHRIS;HIRIYANNAIAH HARISH;VORA YOUNUS;DING PING;HILL ANDREW |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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