| 摘要 |
PURPOSE: A hole inspection apparatus and a hole inspecting method using the same are provided to shorten the test time the holes formed in an insulation layer using a plurality of electronic beam irradiation devices. CONSTITUTION: An electronics column(100) irradiates an electronic beam on three holes(21). An insulation layer(20) is formed while being divided into two sections. A conductive layer(30) is placed in the lower part of the insulation layer. Three holes, which is tested with one electronic column, are formed in the insulation layer. Electrons, which pass through the holes of each insulation layer, are detected.
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