SUBSTRATE DETACHING APPARATUS OF LLO PROCESS

摘要

PURPOSE: An apparatus for detaching a substrate in a laser lift-off process is provided to increase the packaging density of a substrate by simultaneously preventing the characteristic of an LED element from being dropped and keeping the advantage of a vertical electrode structure. CONSTITUTION: A buffer layer(20) is formed at the upper part of a sapphire substrate(10). A gallium nitride-based LED structure(30) is laminated on the surface of the buffer layer. The gallium nitride-based LED structure comprises a N-type nitride gallium film(31), an active layer(32), a P-type nitride gallium film(33), a P-type electrode layer(34), and a reflecting layer(35). A plurality of structural support layers(40) is laminated on the top surface of the LED structure. A vacuum chuck(110) respectively adsorbs the substrate and the structural support layer onto the top part and lower part.