| 摘要 |
PURPOSE: A substrate processing apparatus is provided to use a substrate holder only in a process which essentially requires usage of the substrate holder, thereby improving the efficiency of a substrate processing process. CONSTITUTION: A preheating part(200) preheats a substrate(10). A substrate processing part processes the substrate. A cooling part(500) cools the processed substrate. The preheating part comprises a substrate support pin(230) and a substrate holder support pin(240) supporting a substrate holder(20). A penetration hole is arranged in the substrate holder.
|
