发明名称 |
Methods for introduction of a reactive material into a vacuum chamber |
摘要 |
Methods for the introduction of a reactive material into a vacuum chamber while minimizing or eliminating the simultaneous introduction of contaminating materials or substances. As a result, contaminating materials and substances that can interfere with any measurements or other processes that occur in the vacuum chamber are minimized or eliminated. |
申请公布号 |
US8071019(B2) |
申请公布日期 |
2011.12.06 |
申请号 |
US20080263186 |
申请日期 |
2008.10.31 |
申请人 |
TOUCHBERRY ALAN BRUCE;STARK TERRY DEAN;HONEYWELL INTERNATIONAL INC. |
发明人 |
TOUCHBERRY ALAN BRUCE;STARK TERRY DEAN |
分类号 |
C22C24/00;H01L21/677 |
主分类号 |
C22C24/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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