| 摘要 |
PURPOSE: A chamber with a branching prevention structure is provided to remarkably reduce a particle which flows into a chamber by minimizing a cracking phenomenon between a chamber body and a chamber lid. CONSTITUTION: A chamber body(51) has a structure in which the top is opened. A groove(52) is formed in the combining surface(53) of the chamber body. The inside combining surface(53a) of the chamber body is formed to be lower than the outside combining surface(53b) of the chamber body to a horizontal direction. A chamber lid(61) is combined on the top of the chamber body and opens and closes the chamber. A sealing member(70) performs a sealing function while being included in the combining surface of the chamber lid and the chamber body.
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