| 摘要 |
<p>A hard, wear-resistant aluminum nitride based coating of composition AlxSiyMezN is proposed; x, y and z denote atomic fractions, the sum of which is between 0.95 and 1.05, and wherein Me is a metal dopant of group III to VIII and Ib transition metals or a combination thereof. The metal provides, during the coating process, an intrinsic electrical conductivity higher than the coating without the metal doping. The silicon content is in between 0.01≰y≰0.4 and the content of the metal dopant or dopants Me is 0.001≰z≰0.8, preferably 0.01≰z≰0.05 and most preferably 0.015≰z≰0.045.</p> |
