发明名称 |
IMPRINT APPARATUS AND IMPRINT METHOD USING IT |
摘要 |
PURPOSE: An imprint device and an imprint method using the same are provided to form uniform patterns on a substrate by pushing a stamp physically adhered to the substrate using the pressing force of gas. CONSTITUTION: An imprint device(1000) comprises a support unit(100) and a template unit(300). A substrate is placed on the support unit. The support unit moves the substrate. The template unit vacuum-sucks a stamp having patterns and supports the stamp. The template unit pushes the stamp by jetting gas to one surface of the stamp so that the other surface of the stamp can be uniformly pressed on the substrate.
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申请公布号 |
KR20110130237(A) |
申请公布日期 |
2011.12.05 |
申请号 |
KR20100049788 |
申请日期 |
2010.05.27 |
申请人 |
AP SYSTEMS INC. |
发明人 |
LEE, CHUN SOO;LEE, SEOK JEONG |
分类号 |
B29C59/02;B29C33/18;B29C43/02 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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