Probe unit having buffer layer with high elasticity under cantilevers and manufacturing method thereof,申请号KR20090084150-传众专利搜索

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发明名称	Probe unit having buffer layer with high elasticity under cantilevers and manufacturing method thereof
摘要
申请公布号	KR101089264(B1)	申请公布日期	2011.12.05
申请号	KR20090084150	申请日期	2009.09.07
申请人		发明人
分类号	H01L21/66;G01R1/073;G01R3/00	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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