| 摘要 |
<p>Provided is a fluid heating device capable of suppressing reduction of heating efficiency even if a fluid mainly containing sulfuric acid is heated. The fluid heating device of the present invention is a fluid heating device for heating chemicals mainly containing sulfuric acid, and includes a translucent inner tube 3a composed of quartz or the like; a lamp heater 4 disposed in the inner tube; a translucent outer tube 2 disposed outside the inner tube, which is composed of quartz or the like; translucent side plates 15a and 15b disposed on both sides of the outer tube, which include quartz or the like; and an amorphous carbon pipe 1 disposed between the outer tube and the inner tube, which functions as a light-absorbing material, wherein the amorphous carbon pipe 1 is disposed so as to be brought into contact with chemicals passing through a space between the outer tube and the inner tube.</p> |
