METHOD OF MANUFACTURING NANOWIRES

摘要

PURPOSE: A method for manufacturing nano-wires is provided to grow nano-wires without a catalyst and selectively grow the nano-wires of a desired material by controlling an atmosphere inside a reactor. CONSTITUTION: A substrate(10) is prepared. A ternary component-based thin film containing tellurium is deposited on the substrate without a catalytic material through a sputtering process. The substrate with the thin film is annealed in a reactor of an oxidizing atmosphere. The tellurium is phase-separated to be grown from the thin film in a wire shape. The thickness of the ternary component-based thin film is 50nm. Multi-crystalline tellurium nano-wires, mono-crystalline tellurium nano-wires, resin-shaped nano-wires, or mono-crystalline nano-wires and nano-tubes are grown.