发明名称 LOW-K SILOXANE PASSIVATION LAYER COMPOSITION
摘要 PURPOSE: A low-dielectric siloxane composition for a passivation layer is provided to have low permittivity, superior insulation properties, high transparency, superior thermal stability, flatness, adhesive properties, and solution- processability at low temperatures, thereby being qualified for the passivation layer of a thin film transistor. CONSTITUTION: A low-dielectric siloxane composition for a passivation layer comprises fluorinated organic oligosiloxane manufactured by a sol-gel method. The fluorinated organic oligosiloxane includes organic alkoxysilane having a symmetric structure, fluorinated alkoxysilane, and organic silanol or organic alkoxysilane having a symmetric structure. The siloxane composition includes fluorinated organic oligosiloxane having 1-30mol% fluorinated alkoxysilane comparison to the silane compound. The siloxane composition includes fluorinated organic oligosiloxane having 30-60mol% organic silanol or fluorinated alkoxysilane of the symmetric structure.
申请公布号 KR20110129587(A) 申请公布日期 2011.12.02
申请号 KR20100049051 申请日期 2010.05.26
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 BAE, BYEONG SOO;YANG, SEUNG CHEOL
分类号 C09D183/02;C09D127/12;C09D183/04;H01L21/56 主分类号 C09D183/02
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