发明名称 LIQUID JETTING APPARATUS
摘要 A liquid ejecting apparatus having a storage portion (20) for storing a treatment liquid, a slit-shaped opening portion (41) for ejecting the treatment liquid, and a connecting passage (42) that has a slit-shaped cross-section and connects the storage portion (20) to the slit-shaped opening portion (41) includes: a valve body portion (50) that is provided in the storage portion (20) to cover the connecting passage (42), and forms a gap (22) together with a lower wall (43) of the storage portion (20) so that the treatment liquid is caused to flow into the connecting passage (42) through the gap (22); a first curved surface portion (44a) that smoothly connects a surface of the lower wall (43) of the storage portion (20) to an inner wall surface (42a) of the connecting passage (42); and a second curved surface portion (51a) that is provided on the valve body portion (50) so as to project to an identical side to the first curved surface portion (44a). With this constitution, air bubbles can be prevented from intermixing with the treatment liquid ejected from the slit-shaped opening portion (41).
申请公布号 KR20110129986(A) 申请公布日期 2011.12.02
申请号 KR20117027169 申请日期 2010.04.16
申请人 CKD CORPORATION 发明人 KOUKETSU MASAYUKI;ITAFUJI HIROSHI
分类号 B05C5/02;H01L21/306 主分类号 B05C5/02
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