| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a pad window leading to a bonding pad part capable of restraining a generation of a crown when forming a protection film with a spin coating method and to provide a composition for forming the protection film applicable to the method for forming the pad window. <P>SOLUTION: A composition for forming a protection film containing a water soluble polymer and a compound as expressed in the following formula (1) is applied by a spin coating method in a manner that covers a microlens. In the formula (1), R<SP POS="POST">1</SP>to R<SP POS="POST">4</SP>are alkyl radicals with carbon numbers 1 to 5, R<SP POS="POST">5</SP>and R<SP POS="POST">6</SP>are alkylene group with carbon numbers 2 to 4, and n and m are integers of 0 to 50. Thus, the method enables a protection film formed by the spin coating method to surely coat a stepped portion and can restrain generation of a crown. <P>COPYRIGHT: (C)2012,JPO&INPIT |
