| 摘要 |
When model expressions of objective functions are generated at vertexes of a quadrilateral on a plane concerning P and N channels of transistors in SRAM, the initial number of times of simulation is allocated to each objective function at each designated vertex according to weight values set based on relationships presumed among the objective functions at each designated vertex. For each objective function at each designated vertex, first simulation is executed the allocated number of times. Furthermore, a model expression is generated from the first simulation result, and an evaluation indicator of an approximation accuracy of the model expression is calculated. Then, for each model expression, it is determined whether the corresponding model expression has influence on the yield, and based on the evaluation indicator of the corresponding model expression and presence or absence of the influence, it is determined whether additional simulation is required for the corresponding objective function.
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