Combined micromechanical rotation rate-and magnetic field sensor, has elastically deflectable suspended vibrating structure, and detection structure detecting deflection of vibrating structure caused by Coriolis-force and Lorentz-force

摘要

The sensor has a substrate, and an elastically deflectable suspended vibrating structure that is provided on the substrate. A conductive path structure (7) is coupled with the suspended vibrating structure for conducting a predetermined current. A detection structure is provided for detecting deflection of the vibrating structure caused by Coriolis-force occurring as a consequence of rotation of the sensor, and Lorentz-force (F L1, F L2) occurring as a consequence of external magnetic field (B X) in a current carrying conductive path structure. An independent claim is also included for a method for operating a combined micromechanical rotation rate-and magnetic field sensor.