发明名称 SEMICONDUCTOR DEVICE PRODUCTION METHOD
摘要 This semiconductor device includes a first device and a second device provided on a semiconductor substrate and having different breakdown voltages. More specifically, the semiconductor device includes a semiconductor substrate, a first region defined on the semiconductor substrate and having a first device formation region isolated by a device isolation portion formed by filling an insulator in a trench formed in the semiconductor substrate, a first device provided in the first device formation region, a second region defined on the semiconductor substrate separately from the first region and having a second device formation region, and a second device provided in the second device formation region and having a higher breakdown voltage than the first device, the second device having a drift drain structure in which a LOCOS oxide film thicker than a gate insulation film thereof is disposed at an edge of a gate electrode thereof.
申请公布号 US2011294272(A1) 申请公布日期 2011.12.01
申请号 US201113205970 申请日期 2011.08.09
申请人 YAMANAKA TAKAMITSU;ROHM CO., LTD. 发明人 YAMANAKA TAKAMITSU
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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