SEMICONDUCTOR MANUFACTURING APPARATUS HAVING IMPROVED SCALE FILTERING EFFECT

摘要

The present invention relates to a semiconductor manufacturing apparatus having improved scale filtering effect. The semiconductor manufacturing apparatus having improved scale filtering effect according to the present invention comprises: a housing; a reactor tube coated its outside with Zn for generating (-) ions; a magnetic stone disposed in the reactor tube for generating current corresponding to (-) ions; covers for covering the upper and lower parts of the reactor tube: covers made of teflon for covering the upper and lower parts of the reactor tube: and a housing cover for covering the housing through an O-ring. The present invention has the advantages that current can be continuously generated because structure and composition of the reactor tube are changed and durability can be increased because combining structure of the housing and the reactor tube is changed.