发明名称 |
Method of Preventing Premature Drying |
摘要 |
A method for processing a substrate includes receiving a substrate and processing the substrate using a first fluid meniscus and a second fluid meniscus. The first fluid meniscus and the second fluid meniscus are applied to a surface of the substrate such that the first fluid meniscus is spaced apart from the second fluid meniscus by a transition region. A saturated gas chemistry is applied to the surface of the substrate at the transition region. The saturated gas chemistry is configured to maintain moisture in the transition region so as to prevent drying of the surface of the substrate in the transition region, before the second fluid meniscus is applied to the surface of the substrate. |
申请公布号 |
US2011294301(A1) |
申请公布日期 |
2011.12.01 |
申请号 |
US201113207405 |
申请日期 |
2011.08.10 |
申请人 |
YUN SEOKMIN;WILCOSSON MARK;LAM RESEARCH CORPORATION |
发明人 |
YUN SEOKMIN;WILCOSSON MARK |
分类号 |
H01L21/306;B08B3/00 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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