| 发明名称 |
APPARATUS AND METHOD FOR ELECTROSTATIC DISCHARGE (ESD) REDUCTION |
| 摘要 |
<p>A substrate support unit adapted for a system for testing or processing of a substrate is provided. The substrate support unit includes a support table having at least one substrate carrier structure adapted to support a substrate, wherein the substrate carrier structure is electrically floating with respect to ground.</p> |
| 申请公布号 |
WO2011147775(A1) |
申请公布日期 |
2011.12.01 |
| 申请号 |
WO2011EP58362 |
申请日期 |
2011.05.23 |
| 申请人 |
APPLIED MATERIALS, INC.;MUELLER, BERNHARD GUNTER |
发明人 |
MUELLER, BERNHARD GUNTER |
| 分类号 |
H01L21/683;G03F7/20;G03F9/00;H01L21/027 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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