| 摘要 |
<P>PROBLEM TO BE SOLVED: To correct the inclination of a substrate while the substrate is moving. <P>SOLUTION: A substrate conveyance line 5 is composed of a left-side roller conveyor 5L, which is on the left side with respect to the conveyance direction (indicated by the arrow) of a lower substrate 1, and a right-side conveyor 5R, which is on the right side. The left-side roller conveyor 5L has a line of rollers 21a in the conveyance direction of the lower substrate 1, and the right-side roller conveyor 5R also has a line of rollers 21b in the conveyance direction of the lower substrate 1. They are provided with corresponding substrate detection sensors, 24a and 24b. If the lower substrate 1 being conveyed is inclined as shown in FIG. 2(b), the substrate detection sensors 24a and 24b of the roller conveyors 5L and 5R respectively detect the degree and direction of this inclination from a time difference between the timings of detection of the corresponding edges of the lower substrate 1. According to the detection result, the conveying speed of the rollers 21a of the roller conveyor 5L or the rollers 21b of the roller conveyor 5R is made different from a constant speed. The lower substrate 1 is rotated by the inclination angle. <P>COPYRIGHT: (C)2012,JPO&INPIT |
