| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding device including a noncontact thickness measuring means which easily suppresses the attenuation of an inspection light beam caused by propagation in liquid. <P>SOLUTION: The noncontact thickness measuring means is configured as follows. Water W is supplied to a clearance 57 between the workpiece 1 and a counter surface 52c facing a workpiece 1 and being a lower surface of a case 52 of a light-emitting/light-receiving part 50 so as to fill the clearance with the water. Then, in that state, the inspection light beam is emitted to the workpiece 1 from a light-emitting/light-receiving head 53 stored in the case 52. The light-emitting/light-receiving head 53 receives an interference wave of the inspection light beam propagated in the water W and reflected by the surface and the rear surface of the workpiece 1. The thickness of the workpiece 1 is calculated on the basis of the waveform of the received interference wave. The water W is supplied to the clearance 57 from a liquid supply part 60 arranged outside the case 52 separately from the light-emitting/light-receiving part 50. The meas brings the counter surface 52c closer to the workpiece 1 as much as possible. <P>COPYRIGHT: (C)2012,JPO&INPIT |
