| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately perform an alignment of optical elements each having an oblique waveguide, even if the positions of the element end faces are deviated from each other in the case of integrating the optical elements. <P>SOLUTION: A method of manufacturing an optical integrated device includes steps of: forming on a first optical element 1 having a first oblique waveguide 5, a plurality of end face position detection markers 11A for detecting the end face position of the optical element, and also, a plurality of first alignment markers 12A corresponding to the respective end face position detection markers; forming on a second optical element 2 having a second oblique waveguide 8, a plurality of second alignment markers 13A aligning with any of the first alignment markers when the end face of the first oblique waveguide aligns with the end face of the second oblique waveguide; performing the alignment of the first alignment marker corresponding to the end face position detection marker, by which the end face position has been detected, with the second alignment marker corresponding to the first alignment marker so as to align the end face of the first oblique waveguide with the end face of the second oblique waveguide, and then, mounting the first optical element on the second optical element. <P>COPYRIGHT: (C)2012,JPO&INPIT |
